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PLASMA SYSTEMS |
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[ PRODUCTION OF SPECIAL PLASMA SYSTEMS ] |
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We build the plasma systems according to your needs. It is necessary to consider the following points:
- sample size
- expected output and yield
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Special plasma systems:
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Special plasma system Tetra-100-LF-PC: |
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The production
plasma system Tetra-100 with 100 litres chamber volume, PC
control and fully automatic door is mainly used for serial production
(cleaning, etching and activation). Some features of Tetra-100:
Type: Plasma etcher Tetra-100-LF-PC with automatic door: |
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Technical Data:
Plasma etcher Tetra-100-LF-PC
switchgear cabinet :
W 2000 mm, H 2200 mm, D 2000 mm
chamber:
W 700 mm, H 200 mm, D 700 mm
chamber volume :
approx. 100 litres
gas supply:
3 gas channels through MFCs
generator:
1 piece (40kHz)
(otional: 13.56 MHz o. 2.45 GHz)
control:
PC control (Windows)
automation:
The system has a drawer door
options / accessories
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TETRA-100-LF-PC:
with PC control. The system has a drawer door. |
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Special plasma system Tetra-120-LF-PC: |
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The production
plasma system Tetra-120 with 120 litres chamber volume, PC
control and fully automatic door is mainly used for serial production
(cleaning, etching and activation). Some features of Tetra-120:
Type: Plasma etcher Tetra-120-LF-PC with automatic door: |
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Technical Data:
Plasma etcher Tetra 120-LF-PC
switchgear cabinet:
W 600 mm, H 2.150 mm, D 1.000 mm
chamber:
W 1.200 mm, H 150 mm, D 1.700 mm
chamber volume:
approx. 120 litres
gas supply:
4 gas channels through MFCs
generator:
2 pcs. (each 40kHz)
(optional: 13.56 MHz or 2.45 GHz)
control:
PC control (Windows) with industrial-fieldbus
automation:
The system has a fully automatic door
options / accessories
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Plasma system TETRA-120-LF-PC: with PC control.
The system has a fully automatic door. |
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Special plasma system Tetra-140-LF-PC: |
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The production
plasma system Tetra-140 with 140 litres chamber volume, PC
control and fully automatic door is mainly used for serial production
(cleaning, etching and activation). Some features of Tetra-140:
Type: Plasma etcher Tetra-140-LF-PC: |
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Technical Data:
Plasma etcher Tetra-140-LF-PC
switchgear cabinet :
W 1.000 mm, H 1.800 mm, D 1.000 mm
chamber:
W 1.000 mm, H 100 mm, D 1.400 mm
chamber volume:
approx. 140 litres
gas supply:
2 gas channels through MFCs, liquid monomer metering for plasma polymerisation
generator:
1 piece (each 40kHz)
(optional: 13.56 MHz o. 2.45 GHz)
control:
PC control (Windows)
options / accessories
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TETRA-140-LF-PC
with PC control. |
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Special plasma system Tetra-240-LF-PC: |
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The production
plasma system Tetra-240 with 240 litres chamber volume, PC
control and fully automatic door is mainly used for serial production
(cleaning, etching and activation). Some features of Tetra-240:
Type: Plasma etcher Tetra-240-LF-PC |
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Technical Data:
Plasma etcher Tetra-240-LF-PC
switchgear cabinet:
W 600 mm, H 1700 mm, D 3200 mm
chamber:
W 305 mm, H 300 mm, D 2600 mm
chamber volume:
approx. 240 litres
gas supply:
3 gas channels through MFCs
generator:
1 piece (40kHz)
(optional: 13.56 MHz o. 2.45 GHz)
control:
PC control (Windows)
options / accessories
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TETRA-240-LF-PC
with PC control. |
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Special plasma system Tetra-375-LF-PC: |
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The production
plasma system Tetra-375 with 375 litres chamber volume, PC
control and fully automatic door is mainly used for serial production
(cleaning, etching and activation). Some features of Tetra-375:
Type: Plasma etcher Tetra-375-LF-PC |
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Technical Data:
Plasma etcher Tetra-375-LF-PC
switchgear cabinet:
W 600 mm, H 2.100 mm, D 800 mm
chamber:
W 600 mm, H 360 mm, D 1.900 mm
chamber volume:
approx. 375 litres
gas supply:
2 gas channels through MFCs
generator:
2 pcs. (each 40kHz)
(optional: 13.56 MHz o. 2.45 GHz)
control:
PC control (Windows)
options / accessories
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TETRA-375-LF-PC with PC control |
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Special plasma system Tetra-400-LF-PC: |
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The production
plasma system Tetra-400 with 400 litres chamber volume, PC
control and fully automatic sliding door is mainly used for serial production
(cleaning, etching and activation).
Type: Plasma etcher Tetra-400-LF-PC with automatic sliding door: |
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Technical data:
Plasma etcher Tetra-400-LF-PC
Switchgear cabinet:
W 600 mm, H 2.100 mm, D 650 mm
Chamber:
W 915 mm, H 750 mm, d 725 mm
Chamber volume:
approx. 400 itres
Gas supply:
3 gas channels through MFCs
Generator:
2 pcs. (each 40kHz)
(Optional: 13,56 MHz or 2,45 GHz)
Control:
PC-control (Windows)
automation:
The system has a fully automatic sliding door
options / accessories
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Plasma system TETRA-400-LF-PC with PC-control |
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The special plasma system TETRA-400-LF-PC has an automatic sliding door. |
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Special plasma system Tetra-420-LF-PC: |
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The production
plasma system Tetra-420 with 420 litres chamber volume, PC
control and fully automatic sliding door is mainly used for serial production
(cleaning, etching and activation).
Type: Plasma etcher Tetra-420-LF-PC |
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Technical Data:
Plasma etcher Tetra-420-LF-PC
switchgear cabinet :
W 1.600 mm, H 2.100 mm, D 1.200 mm
chamber:
W 750 mm, H 800 mm, D 750 mm
chamber volume:
approx. 420 litres
gas supply:
4 gas channels through MFCs
generator:
4 pcs. (each 40kHz)
(optional: 13.56 MHz o. 2.45 GHz)
control:
PC control (Windows)
options / accessories |
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TETRA-420-LF-PC |
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PCB tray |
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Special system Tetra-500-LF-PC: |
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The production
plasma system Tetra-500 with 500 litres chamber volume, PC
control and fully automatic sliding door is mainly used for serial production
(cleaning, etching and activation).
Type: Plasma etcher Tetra-500-LF-PC / roll to roll: |
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Technical Data:
Plasma etcher Tetra-500-LF-PC
switchgear cabinet:
W 600 mm, H 2.100 mm, D 800 mm
chamber:
W 1.500 mm, H 1.700 mm, D 200 mm
chamber volume :
approx. 500 litres
gas supply:
3 gas channels through MFCs
generator:
2 pcs. (each 40 kHz)
(optional: 13.56 MHz o. 2.45 GHz)
trays:
2 rolle to rolle systeme
control:
PC control(Windows)
options / accessories
TETRA-500-LF-PC /
rolle to rolle system:
with PC control. |
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roll to roll system: inside
Tetra-500-LF-PC /
roll to roll system:
side |
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Special plasma system Tetra-600-LF-PC version 1: |
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The production
plasma system Tetra-600 with 600 litres chamber volume, PC
control is mainly used for serial production
(cleaning, etching and activation).
Type: Plasma etcher Tetra-600-LF-PC: |
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Technical Data:
Plasma etcher Tetra-600-LF-PC
switchgear cabinet :
W 600 mm, H 2.200 mm, D 800 mm
chamber:
W 1.000 mm, H 1.000 mm, D 600 mm
chamber volume:
approx. 600 litres
generator:
2 pcs. (each 40 kHz)
(optional: 13.56 MHZ o. 2.45 MHz)
trays:
up to 10 trays
control:
PC control (Windows) with
industrial fieldbus
options / accessories
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TETRA-600-LF-PC: with trays,closed
TETRA-600-LF-PC: with trays, open
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Special plasma system Tetra-600-LF-PC version 2: |
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The production
plasma system Tetra-600 with 600 litres chamber volume, PC
control is mainly used for serial production
(cleaning, etching and activation).
Type: Plasma etcher Tetra-600-LF-PC: |
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Technical Data:
Plasma etcher Tetra-600-LF-PC
switchgear cabinet :
W 1.800 mm, H 1.800 mm, D 800 mm
chamber:
W 580 mm, H 730 mm, D 1.000 mm
door with 2 glasses
chamber volume:
approx. 600 litres
generator:
1 pc. 40 kHz, automatic matching
gas supply:
2 gas channels through MFC
control:
PC control (Windows) with industrial fieldbus
options / accessories
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TETRA-600-LF-PC: with tray, closed
TETRA-600-LF-PC:with tray, open
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Special plasma system Tetra-600-LF-PC with rotary drum version 1: |
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The production
plasma system Tetra-600 with 600 litres chamber volume, rotary drum and PC
control is mainly used for serial production
(cleaning, etching and activation).
Type: Plasma etcher Tetra-600-LF-PC with rotary drum: |
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Technical Data:
Plasma etcher Tetra-600-LF-PC
switchgear cabinet :
W 600 mm, H 2.200 mm, D 800 mm
chamber:
W 1.100 mm, H 1.100 mm, D 700 mm
chamber volume:
approx. 600 litres
generator:
2 pcs. (each 40 kHz)
(optional: 13.56 MHz o. 2.45 GHz)
trays:
rotary drum (with 4 trays each
30 litres)
control:
PC control (Windows)
with industrial fieldbus
options / accessories
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TETRA-600-LF-PC: with rotary drum, closed
TETRA-600-LF-PC: with rotary drum, open
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Special plasma system Tetra-600-LF-PC with rotary drum version 2: |
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The production
plasma system Tetra-600 with 600 litres chamber volume, rotary drum and PC
control is mainly used for serial production
(cleaning, etching and activation).
Type: Plasma etcher Tetra-600-LF-PC with rotary drum: |
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Technical Data:
Plasma etcher Tetra-600-LF-PC
switchgear cabinet :
W 1.000 mm, H 2.200 mm, D 1.800 mm
chamber:
W 750 mm, H 1.000 mm, D 750 mm
door with two glasses
chamber volume:
approx. 600 litres
generator:
4 pcs. (each 40 kHz)
automatc matching
gas supply:
2 gas channels through MFC
control:
PC control (Windows)
with industrial fieldbus
options / accessories
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TETRA-600-LF-PC: with rotary drum, closed
TETRA-600-LF-PC: with rotary drum, open
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Special plasma system Tetra-2.000-LF-PC |
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The production
plasma system Tetra-2000 with 2000 litres chamber volume, rotary drum and PC
control is mainly used for serial production
(cleaning, etching and activation).
Type: Plasma etcher Tetra-2.000-LF-PC |
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Technical Data:
Plasma etcher Tetra-2.000-LF-PC
chamber:
W 1.000 mm, H 2.000 mm, D 1.000 mm
chamber volume:
approx. 2.000 litres
generator:
1 piece (13.56 MHz)
trays:
filling with trays (see third picture)
control:
PC control (Windows) with industrial fieldbus
options / accessories
Tray for the vacuum chamber of the plasma system |
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Tetra-2.000-LF-PC: for cleaning and activation of plastics before panting.
Tetra-2.000-LF-PC chamber |
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Special plasma system Tetra-2400-LF-PC: |
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The production
plasma system Tetra-2400 with 2400 litres chamber volume and
PC-control is mainly used for serial production (cleaning and activation).
Some features of Tetra-2400: |
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Technical Data:
Plasma etcher Tetra-2400-LF-PC
switchgear cabinet:
W 600 mm, H 2,200 mm, D 800 mm
chamber:
Ø 1,100 mm, H 1,100, D 1,100 mm
chamber volume:
approx. 2400 litres
generator:
4 pcs. (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
trays:
rotary drum (with 16 baskets each 30 litres volume)
control:
PC control (Windows) with industrial field bus
options / accessories
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Plasma system TETRA-2400-LF-PC for production:
Cleaning, activation and etching
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Special plasma system Tetra-2800-LF: |
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The production
plasma system Tetra-2800 with 2800 litres chamber volume and
PC-control is mainly used for serial production (cleaning and activation).
Some features of Tetra-2800:
Type: Plasma etcher Tetra-2800-LF |
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Technical Data:
Plasma etcher Tetra-2800-LF
switchgear cabinet :
W 600 mm, H 1700 mm, D 800 mm
chamber:
Ø 1200 mm, D 2500 mm
chamber volume:
approx. 2800 litres
gas supply:
3 gas channles through MFCs
generator:
1 piece (40kHz)
(optional: 13.56 MHz o. 2.45 GHz)
options / accessories
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TETRA-2800-LF
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Special plasma system Tetra-4400-LF-PC: |
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The production
plasma system Tetra-4400 with 4400 litres chamber volume and
PC-control is mainly used for serial production (cleaning and activation).
Some features of Tetra-4400:
Type: Plasma etcher Tetra-4400-LF-PC |
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Technical Data:
Plasma etcher
Tetra-4400-LF-PC
switchgear cabinet:
W 1800 mm, H 1000 mm, D 800 mm
chamber :
W 1350 mm, D 1250 mm,
H 2600 mm
chamber volume:
approx. 4400 litres
gas supply:
3 gas supply through MFCs
generator:
radiofrequency input:
4 pcs. (40kHz)
control:
PC control(Windows)
Features:
oxygen generator
Plasma-exhaust cleaning for r roots pumps
options / accessories
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TETRA-LF-PC 4400
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Special plasma system Tetra-5600-LF-PC: |
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The production
plasma system Tetra-5600 with 5600 litres chamber volume and
PC-control is mainly used for serial production (cleaning and activation).
Some features of Tetra-5600:
Tray: Plasma etcher Tetra-5.600-LF-PC:
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Technical Data:
Plasma etcher Tetra-5600-LF-PC
Switchgear cabinet :
W 1.800 mm, H 2.200 mm, D 1.800 mm
Chamber:
W 1.500 mm, H 2.000 mm, D 2.500 mm
chamber volume:
approx. 5.600 litres
gas supply:
3 gas channels through MFCs
generator:
6 pcs. (each 40 kHz)
(optional: 13.56 MHZ o. 2.45 MHz)
Trays:
To charge the chamber, carriages are used
control:
PC control (Windows)
options / accessories
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TETRA-5600-LF-PC: with trays, closed
TETRA-5600-LF-PC: with trays, open |
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Special plasma system Tetra-7500-LF-PC: |
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The production
plasma system Tetra-7500 with 7500 litres chamber volume and
PC-control is mainly used for serial production (cleaning and activation).
Some features of Tetra-7500:
Type: Plasma etcher Tetra-7500-LF-PC |
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Technical Data:
Plasma etcher
Tetra-7500-LF-PC
switchgear cabinet :
W 3000 mm, H 2000 mm, D 1000 mm
chamber:
L 2250 mm, D 1000 mm, H 2450 mm
chamber volume:
approx. 7500 litres
gas supply:
2 gas channels throughMFCs
generator:
1 pc. (40kHz)
(optional: 13.56 MHz o. 2.45 GHz)
control:
PC control (Windows)
options / accessories
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TETRA-LF-PC 7500
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Special plasma system Tetra-12.600-LF-PC |
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The production
plasma system Tetra-12.600 with 12.600 litres chamber volume,
and PC-control is mainly used for serial production (cleaning and
activation).
Some features of Tetra-12.600: |
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Technical data:
Plasma etcher Tetra-12.600-LF-PC
chamber:
W 2,400 mm, H 2,100 mm, D 2,500 mm
chamber volume:
approx. 12,600 litres
generator:
6 pcs. (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
trays:
To charge the chamber, carriages are used(see below)
control:
PC control (Windows) with industrial fieldbus
options / accessories
Plasma in Tetra-12.600-LF-PC: Activation of plastic
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Plasma system Tetra-12.600-LF-PC here: For cleaning and activation
of plastics parts before painting
To charge the chamber, carriages are used |
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