| |
Technical Data:
switchgear cabinet:
W 600 mm, H 2.200 mm, D 800 mm
chamber:
W 400 mm, D 625 mm, H 625 mm
chamber volume:
approx. 100 litres
gas supply:
2 gas channels through needle valve
generator:
40kHz/0-2500 W
(optional: 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type D40B (40 m³/h)
trays:
up to 10 trays
(optional: rotary drum)
control:
PC control (Windows)
options / accessories
|
|
TETRA-100-LF for cleaning, activation and etching in
production.
Sixfold tray and rotary drum for TETRA systems. |
